Of course! The semiconductor business is a rapidly expanding and rising sector with stringent requirements that suppliers must meet. This is true of optical metrology systems, which are essential in all phases of wafer manufacturing, from the earliest bare wafers to fully formed and isolated devices. Tools like wafer processing robots and EFEM are a few essential equipments used in the semiconductor industry.
We at Kensington Laboratory can deploy load ports for the requested wafer cassettes and provide handling equipment for various wafer sizes and shapes. Depending on the wafer sizes and the specific tool setup, we offer a tailor-made solution to our clients. Not only with specific equipment like Kensington motion controller, but the same goes with all our tools that can provide a solution based on customer specifications and wafer types.
Wafers
In addition to silicon, glass, silicon carbide, germanium, gallium arsenide, and other semiconductor materials can also be used to create bare wafers. Wafers range in size from 2″ to 12″ and are processed through several processes until the final product is produced. The thickness of the wafers and the warpage, or how strongly the wafer can bend, are the two most important factors for handling the wafer. The warpage ranges from a few micrometers to a few millimeters, while the thickness ranges from 0.1 mm to a few mm.
It is required to safeguard the wafer surface during several manufacturing process phases. Applying tape to the wafer or setting it in a frame on the tape can do this. A wafer load port is where the operator places the cassette or FOUP containing the wafers that need to be measured in the clean room. The load port can automatically identify the type of cassette or FOUP inserted into the machine. The system then determines the cassette slot counts and wafer sizes. Different wafer sizes can also be used with single-load ports.
Pre-Aligner
The pre-aligner corrects the system's wafer alignment. The position and possible rotation of the wafer as it exits the cassette/FOUP will be fixed. The measuring system only needs to slightly alter the measurement location because the end effector assists the robot in placing the wafers exactly in the same position on the measurement stage.
The wafer ID or a barcode imprinted on the wafer can also be scanned using a scanner next to the wafer pre-aligner. Doing so will make it easier to identify the wafer and automatically match the suitable wafer to the measurement findings.
End Effectors
The robot handling unit's end effectors are what grip the wafer to finish the inspection. The appropriate end effector must be chosen according to the wafer's size, thickness, and form.
Several different handling techniques can be used, ranging from straightforward vacuum end effectors to needle end effectors to so-called edge-grip end effectors that barely make contact with the delicate wafer surfaces. Customers may easily manage various wafer sizes and shapes by using end effector changing stations that can be added to fully automated equipment.
Please contact our team if you would like more information about the different tools of Kensington Laboratory.
