Kensington Laboratories, LLC, since 1976 has created innovative automation and precision motion control solutions for a wide range of industrial, scientific, and academic applications. Its primary focus is on providing groundbreaking and rigorous technical solutions, wafer-handling robots, and precision stages.
Automatic Door Opener (ADO) – 300mm FOUP Load Port for Automated Wafer Handling is one such innovation that is created to meet today's stringent wafer separation and fab specifications.
What is a FOUP?
FOUP stands for Front Opening Universal Pod and 300mm FOUP is an innovative enclosure with the potential to manage and handle silicon wafers in a secure and protective environment. FOUP is also defined as Front Opening Unified Pod. The main principle or primary objective of FOUP is to place the wafers in the machine to boost and improve the operational processing performance.
What do you get
- Particle performance is improved greatly.
- Vibration reduction during door opening/closing using a hybrid of pneumatic and electric-driven mechanisms.
- High-sealed FOUP compliance.
The Automatic Door Opener incorporates a number of patented, one-of-a-kind design elements that work together to offer superior operational motion, neatness, consistency, and interoperability versatility for the loading and unloading SEMI standard 300mm FOUPs. Kensington's ADO has been proven in production volume at major 300mm production fabs and is supported by Kensington's global support and maintenance network.
The FOUP comprises numerous coupling plates, holes, and pins that are managed by an automatic material handling system and are located above the load port.
Let’s look at a few advantages of 300mm FOUP Load Port
- Compatibility – The 300mm FOUP Load Port for Automated Wafer Handling has good compatibility with all types of SEMI standard FOUPs
- Certifications – The compatibility with SEMI compliance ensures a top-level performance, it is also ROHS compliant along with CE certification
- A 300mm FOUP does not require a door and plate alignment
- The 300mm FOUP requires zero preventative maintenance
- Remarkable extremely precise design necessitates no lubrication or re-alignment on a regular basis.
- It comes along with bearings and lubrication-free screws that deliver high-end performance.
- Break-The-Beam wafer mapping provides fast and accurate wafer detection.
- It also offers amazing customization options: Configurable lights, buttons, carrier ID, and AMHS choices are among the configurable features.
