In order to meet the increasing sensitivity of integrated circuit (IC) manufacturing to pollutants, semiconductor wafer factories have begun to look for their chemical manufacturer.
Adopt new pollution control standards to improve quality and help reduce wafer defects. Each material has several contact points during chemical manufacturing, storage, transportation and delivery, which may increase or produce contaminants. Semiconductor Fabs seek assurance from their material suppliers to minimize the chance of contamination on the wafer.
It is well known that particles have a negative effect on semiconductor manufacturing performance. Chemical manufacturer has the opportunity to improve product quality by reviewing their pollution control strategies and to align with best practices of their customers. Industrial standard methods have been used to proportionally improve filtration performance as a technological node. Generally speaking, filtration is an effective tool, Fig. 2, but a universal filtering method is not enough, because new pollutants will bring new threats, and our ability to detect new pollutants is challenged. Since metals, ions, particles, and organic extracts can be added to clean materials by interacting with components in the chemical transport pathway, optimizing pollution control management methods requires evaluating the structural materials in the pathway and the interactions between the components and the chemicals being treated. Filters should be selected to remove contaminants of interest, avoid harmful interactions, and meet manageable cost of ownership lifecycle requirements.
Members of the endgris application engineering team discussed the challenges and opportunities facing chemical manufacturer.
Cooperation between semiconductor fabs, chemical suppliers and component suppliers to check the source of defects and make adjustments to meet wafer yield, device performance, and electronic system reliability requirements, while also increasing the cost of ownership of each member of the value chain.
